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http://dx.doi.org/10.3952/lithjphys.44408
Open access article / Atviros prieigos straipsnis
Lith. J. Phys. 44, 291–294 (2004)
DIRECT LASER WRITING OF
CONDUCTIVE STRUCTURES ON INDIUM TIN OXIDE
E. Tamanisa, G. Libertsa, and J. Kleperisb
aDepartment of Physics, Daugavpils University,
Parades 1, LV-5400 Daugavpils, Latvia
E-mail: fizika@dau.lv
bInstitute of Solid State Physics, Kengaraga 8,
LV-1063 Riga, Latvia
Received 20 October 2003
Investigations on the laser-induced reduction
of indium tin oxide (ITO) are presented. Here, the oxygen content
of the material is locally decreased by CW YAG:Nd laser
irradiation in hydrogen atmosphere. The dependences of resistance
of metallized stripes versus laser beam power and beam scanning
velocity are shown. Electrical conductivity of laser-written
stripes was estimated 2–3 orders higher with respect to raw ITO
film conductivity.
Keywords: laser processing, direct laser writing,
laser-assisted reduction
PACS: 42.62.Cf, 73.61.At, 82.50.Bc
TIESIOGINIS LAIDŽIŲJŲ SANDARŲ
IŠDEGINIMAS LAZERIU ANT INDŽIO ALAVO OKSIDO
E. Tamanisa, G. Libertsa, J. Kleperisb
aDaugpilio universitetas, Daugpilis, Latvija
bKieto kūno fizikos institutas, Latvija
Tirta indžio alavo oksido redukcija švitinant
lazerio spinduliu. Deguonies koncentraciją pavyksta lokaliai
sumažinti švitinant YAG:Nd lazeriu vandenilio atmosferoje. Gauta
metalizuotų juostelių varžos priklausomybė nuo lazerio
spinduliuotės galios ir spindulio slinkties greičio. Rasta, kad
lazeriu išdegintų juostelių laidumas yra 2–3 eilėmis didesnis, nei
pradinės nešvitintos plėvelės.
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