Lithuanian Journal of Physics article / Lietuvos fizikos žurnalo straipsnis

[PDF] http://dx.doi.org/10.3952/lithjphys.44510

Open access article / Atviros prieigos straipsnis

Lith. J. Phys. 44, 389–398 (2004)

DEPOSITION OF CARBON FILMS BY DIRECT ION BEAM
Š. Meškinis^a, S. Tamulevičius^a,b, and V. Kopustinskas^b
^aInstitute of Physical Electronics, Kaunas University of Technology, Savanorių 271, LT-50131 Kaunas, Lithuania
^bDepartment of Physics, Kaunas University of Technology, K. Donelaičio 73, LT-44029 Kaunas, Lithuania

Received 14 July 2004

Dedicated to the 100th anniversary of Professor K. Baršauskas

In this study diamond-like carbon (DLC) films have been grown onto the Si(111) and steel substrates by direct hydrocarbon (hexane, acetylene) ion beam deposition. Raman spectra of the room temperature deposited carbon films were typical of the hard tetrahedral amorphous carbon films. At 500 and 750 K temperatures, polymer-like carbon films have been synthesized. Hydrocarbon gas dilution by nitrogen resulted in growth of the more graphitic films. Increase of the deposition temperature resulted in increased internal stress in carbon films deposited from hexane–hydrogen gas mixture. Thin film stress decreased as a result of the hexane–hydrogen mixture dilution by nitrogen. Stress decreased with increase of the nitrogen concentration. It has been revealed that DLC films can be deposited by direct ion beam onto the AISI 316 steel at room temperature. Ion beam nitridation was the best method for increase of adhesion between the DLC and steel substrate.

Keywords: hydrogenated amorphous carbon films, clusters, direct ion beam deposition
PACS: 81.05.Uw, 81.15.Jj, 81.65.Cf, 61.46.+w, 68.55.–a

ANGLIES DANGŲ NUSODINIMAS JONŲ PLUOŠTELIU
Š. Meškinis^a, S. Tamulevičius^a,b, V. Kopustinskas^b
^aPuslaidininkių fizikos institutas, Vilnius, Lietuva
^bFizikinės elektronikos institutas, Kauno technologijos universitetas, Kaunas, Lietuva
^bKauno technologijos universitetas, Kaunas, Lietuva

Deimanto tipo anglies dangos (DTAD) augintos ant Si(111) ir plieno padėklų tiesioginiu angliavandenilių (heksano, acetileno) jonų pluošteliu. Ramano sklaidos spektrai buvo panašūs i kietųjų tetraedrinių amorfinės anglies dangų spektrus. 500 ir 750 K temperatūroje susintezuotos polimeriškos anglies dangos. Auginimo metu angliavandenilių dujas skiedžiant azotu, užaugintos grafitiškesnės dangos. Kylant auginimo temperatūrai, plėvelėse stiprėjo vidiniai įtempiai. Angliavandenilių dujų skiedimas azotu taip pat silpnino vidinius įtempius. Paaiškėjo, kad deimanto tipo anglies dangos gali būti užaugintos kambario temperatūroje tiesioginiu jonų pluošteliu ant AISI 316 plieno. Veiksmingiausias DTAD sankibos su plienu sustiprinimo būdas buvo plieno paviršiaus jonpluoštis nitridavimas.

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