[PDF]
http://dx.doi.org/10.3952/lithjphys.45512
Open access article / Atviros prieigos straipsnis
Lith. J. Phys. 45, 377–382 (2005)
EXCESS CARRIER DYNAMICS IN SiGe
ULTRA-THIN LAYERS ∗
E. Gaubasa A. Uleckasa, and E. Simoenb
aInstitute of Materials Science and Applied
Research, Vilnius University, Saulėtekio 10, LT-10223 Vilnius,
Lithuania
E-mail: edmundas.gaubas@ff.vu.lt
bIMEC, Kapeldreef 75, B-3001 Leuven, Belgium
Received 22 September 2005
The excess carrier decay kinetics, measured by
microwave absorption and reflection techniques in
dislocations-rich strain-relaxed SiGe layered structures, are
analyzed. The simultaneous recombination and multi-trapping
processes were revealed and their parameters were extracted. The
recombination lifetime decreases with threading dislocations
density, while multi-trapping is characterized by a trapping
coefficient > 10.
Keywords: recombination and trapping, strain-relaxed buffer
layers, microwave absorption transients
PACS: 61.72.Hh, 72.40.+w
∗ The report presented at the 36th Lithuanian National
Physics Conference, 16–18 June 2005, Vilnius, Lithuania
PERTEKLINIŲ KRŪVININKŲ DINAMIKA
YPAČ PLONUOSE SiGe DARINIUOSE
E. Gaubasa A. Uleckasa, E. Simoenb
aVilniaus universitetas, Vilnius, Lietuva
bIMEC, Leuven, Belgija
Ištirti daugiasluoksniai įtempto Si
(SSi)-SiGe-C-SiGe buferinių sluoksnių 8–400 nm storio dariniai,
sudaryti ant kristalinio Si padėklų, kaitaliojant buferinio
sluoksnio storį 250–420 nm tarpe ir dislokacijų tankį juose. Tirta
nesąlytiniais nenuostoviosios mikrobangų sugerties ir atspindžio
metodais, kaitaliojant sužadinimo gylį ir palyginant padėklo bei
aktyvaus sluoksnio paviršius. Pasiūlyti tinkamiausi parametrų
išskyrimo režimai, derinant sužadinimo spektrinę sritį,
intensyvumą ir impulsų trukmę. Atskleisti nepusiausvirųjų
krūvininkų tankio relaksacijos ypatumai, kuriuos lemia sparčioji
rekombinacija ir laike ištęsti prilipimo vyksmai.
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