[PDF]
http://dx.doi.org/10.3952/lithjphys.45601
Open access article / Atviros prieigos straipsnis
Lith. J. Phys. 45, 453–455 (2005)
THE INTRODUCTION OF QUANTUM
ELECTRONIC STRUCTURES FOR MEMS DEVICES *
H.L. Hartnagel
aInstitut für Hochfrequenztechnik, Technische
Universität Darmstadt, Merckstrasse 25, D-64283 Darmstadt,
Deutschland
E-mail: hartnagel@hf.tu-darmstadt.de
Received June 13 2005
It is proposed to employ concepts of quantum electronics in
microwave MEMS for a number of applications.
Keywords: quantum electronic structures,
micro-electro-mechanical structures
PACS: 73.21.Ac
* This publication is dedicated to Professor J.
Požela on the occasion of his 80th birthday. He is clearly
remembered as someone with an always open mind for new concepts on
semiconductor device physics. Therefore this manuscript
incorporates a proposal of a new quantum electronic usage for
modern devices such as microelectromechanical structures (MEMS),
as used for RF circuits.
KVANTINĖS ELEKTRONIKOS DARINIŲ
ĮTERPIMAS Į MEMS PRIETAISUS
H.L. Hartnagel
Darmštato technikos universitetas, Darmštatas, Vokietija
Mikroelektromechaninių darinių prietaisuose
siūloma panaudoti kvantinės elektronikos darinius, nurodomos tokių
prietaisų pritaikymo galimybės.
References / Nuorodos
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