[PDF]    http://dx.doi.org/10.3952/lithjphys.50120

Open access article / Atviros prieigos straipsnis

Lith. J. Phys. 50, 95–103 (2010)


EXPERIMENTAL STUDY ON FEMTOSECOND LASER MICROMACHINING OF GROOVES IN STAINLESS STEEL
K. Kuršelis, T. Kudrius, D. Paipulas, O. Balachninaitė, and V. Sirutkaitis
Laser Research Centre, Vilnius University, Saulėtekio 10, LT-10223 Vilnius, Lithuania
E-mail: kestutis.kurselis@ff.vu.lt

Received 20 October 2009; revised 18 March 2010; accepted 19 March 2010

Laser micromachining of grooves having rectangular profile in stainless steel with high repetition rate femtosecond pulses was investigated. Wide range of process parameters, such as peak fluence (0.15–133 J/cm2), pulse repetition rate (10–223 kHz), cumulative exposure dose, and liquid-assisted method for improving both machining efficiency and resultant structure quality was considered in order to provide understanding of underlying physical capabilities and limitations. Thereby the presence of optimal regimes for obtaining respectively maximum pulse energy utilization and maximum machining performance is proved. Logarithmic law of ablation rate for 400 fs laser pulses centred at 1030 nm with repetition rate of 25 kHz is confirmed for this type of machining.
Keywords: femtosecond micromachining, laser ablation, liquid-assisted ablation, rectangular grooves
PACS:81.16.Rf, 81.20.Wk, 61.80.Ba


EKSPERIMENTINIS ITIN MAŽŲ GRIOVELIŲ FORMAVIMO NERŪDIJANČIAME PLIENE FEMTOSEKUNDINIU LAZERIU TYRIMAS
K. Kuršelis, T. Kudrius, D. Paipulas, O. Balachninaitė, V. Sirutkaitis
Nacionalinis politechnikos institutas, Meksikas, Meksika

Tirtas stačiakampio profilio griovelių, kurių charakteringi matmenys yra didesni nei sufokusuoto pluošto diametras, formavimo, naudojant didelio pasikartojimo dažnio femtosekundinius impulsus, dėsningumai. Šiuo tikslu plačiame diapazone buvo keičiamos pagrindinių tokiam apdirbimui svarbių parametrų vertės: impulsų pasikartojimo dažnis (10–223 kHz), impulso energijos įtėkis (0,15–133 J/cm2), spinduliuotės dozė. Išbandytas suaktyvinimo skysčiu metodas, leidžiantis pagerinti tiek apdirbimo proceso, tiek ir gaunamo darinio charakteristikas. Gauti rezultatai padeda lengviau įvertinti šios technologijos galimybes ir suprasti vykstančius fizikinius procesus. Iš jų matyti, kad, tinkamai parinkus parametrus, galima maksimaliai panaudoti spinduliuotės energiją ir pasiekti didžiausią našumą. Taip pat buvo parodyta, kad, naudojant 400 fs 1030 nm centrinio bangos ilgio impulsus ir esant 25 kHz pasikartojimo dažniui, šiam apdirbimo būdui galioja logaritminis abliacijos spartos priklausomybės nuo energijos įtėkio dėsnis.


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