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Open access article / Atviros prieigos straipsnis

Lith. J. Phys. 52, 312326 (2012)


NANOPHOTONIC LITHOGRAPHY: A VERSATILE TOOL FOR MANUFACTURING FUNCTIONAL THREE-DIMENSIONAL MICRO-/NANO-OBJECTS
M. Malinauskas, G. Kiršanskė, S. Rekštytė, T. Jonavičius, E. Kaziulionytė, L. Jonušauskas, A. Žukauskas, R. Gadonas, and A. Piskarskas
Laser Research Center, Department of Quantum Electronics, Faculty of Physics, Vilnius University, Saulėtekio 10, LT-10223 Vilnius, Lithuania
E-mail: mangirdas.malinauskas@ff.vu.lt

Received 30 October 2012 ; accepted 20 December 2012

In this paper, an overview of literature supported by original experimental results on direct laser polymerization of three-dimensional micro-/nano-structuring of various photopolymers is presented. Alternative technologies, principles of threshold based direct laser writing in polymers employing ultrafast lasers, issues of optimization of the laser structuring parameters for increasing fabrication resolution and production throughput are presented and discussed. Examples of woodpile templates and nanogratings are shown as well as an opto-fluidic sensor design for usage in lab-on-chip type devices is demonstrated and its performance is characterized. Additionally, a possibility to produce a three-dimensional electric circuit is introduced.
Keywords: ultrafast laser, 3D microfabrication, nanotechnology, lithography, photopolymers, photoresists, photonic crystals, optofluidics
PACS: 81.16.Rf, 85.85.+j, 42.70.Jk


NANOFOTONINĖ LITOGRAFIJA – UNIVERSALUS BŪDAS FUNKCINIAMS TRIMAČIAMS MIKRODARINIAMS IR NANODARINIAMS FORMUOTI
M. Malinauskas, G. Kiršanskė, S. Rekštytė, T. Jonavičius, E. Kaziulionytė, L. Jonušauskas, A. Žukauskas, R. Gadonas, A. Piskarskas
Vilniaus universiteto Fizikos fakulteto Kvantinės elektronikos katedra ir Lazerinių tyrimų centas, Vilnius, Lietuva

Pristatomas tiesioginės lazerinės polimerizacijos metodas, pateikiama išsami literatūros apžvalga, palyginamos trimačių mikrodarinių ir nanodarinių formavimo alternatyvios technologijos, paaiškinami fizikiniai principai ir taikymo galimybės. Visa tai paremta originaliais eksperimentiniais autorių gautais rezultatais. Darbe parodomi funkcinių trimačių polimerinių mikrodarinių ir nanodarinių pavyzdžiai, apibūdinamas jų veikimas. Pirmąkart pademonstruojama opto-fluidinio lusto lazerinio formavimo ir jo perkėlimo ant kito padėklo bei integruotos trimatės mikro-elektro grandinės įgyvendinimo galimybės.


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